RIBE, CAIBE
- ICP sources – 14 or 20 cm beam size
- Current density up to 4 mA/cm2
- Energy range from 100 to 1000 eV
Automatic pumping unit
- Dry pump or oil rotary pump
- Turbomolecular pump with ceramic or magnetic bearings
- Cryogenic pump
Sample holder
- Tiltable substrate holder with planetary rotation and water cooling
Manual or automatic load lock
Etch finish detectors
- Laser interferometer
- SIMS
Applications
- M-RAM
- Transitional metal treatment
- Microneedles and microtips
